Leybold TURBOVAC 361C Turbomolecular Vacuum Pump E85675

$750.00

Out of stock

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Description

TURBOVAC 361
Inlet flange DN 100 ISO-K • 100 CF 160 ISO-K • 160 CF

Pumping speed
N2
AR
He
H2

l x s-1
l x s-1
l x s-1
l x s-1
345
350
340
340
400

380
370
Max. gas throughput
N2
AR
mbar x I x s-1
mbar x I x s-1
7.5
7.5

Compression ratio
N2
He
H2

  1 x 109
6 x 104
3 x 103
1 x 109
6 x 104
3 x 103
Ultimate pressure

mbar (Torr) < 1 x 10-10 (< 0.75 x 10-10) < 1 x 10-10 (< 0.75 x 10-10)
Max. continuous inlet pressure 1) mbar (Torr 5 x 10-2 (3.75 x 10-2) 5 x 10-2 (3.75 x 10-2)
Max. foreline pressure for N2 mbar (Torr 5 x 10-1 (3.75 x 10-1) 5 x 10-1 (3.75 x 10-1)
Recommended forevacuum pump   from TRIVAC D 16 B to D 25 B ffrom TRIVAC D 16 B to D 25 B
Run-up time to 95% speed min ≈ 2 ≈ 2
Purge / vent port DN 10 KF 10 KF
Cooling water connection
(hoze nozzles)
mm (in.) 10 (0.39) 10 (0.39)
Weight, approx. kg (lbs) 12 (26) 12 (26)
Max. power consumption
at ultimate pressure
VA
VA
680
480
680

Additional information

Weight 32 lbs
Dimensions 15 × 11 × 13 in

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